CORDIS Project
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The 3DAM project focuses on developing advanced metrology and characterization tools for next-generation semiconductor technologies. It addresses challenges posed by new 3D device architectures and materials, aiming to enhance the reliability and speed of semiconductor manufacturing processes.
The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes.
As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges which cannot be met by pushing the present techniques to their limits. 3DAM will be a path-finding pr…
FEI ELECTRON OPTICS BV
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Israel, Rehovot
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
NETHERLANDS ORGANISATION FORAPPLIED SCIENTIFIC RESEARCH
Netherlands, Den Haag
Type: Research institute
Activity type: Research Organisations
SME: No
Israel, REHOVOT
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
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