CORDIS Project
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The ACAPOLY project aims to develop advanced polymer materials for micro and nano-electromechanical systems (MEMS/NEMS). It focuses on modifying specific materials to enable their use in various advanced manufacturing techniques.
ACAPOLY is a partnership between micro resist technology GmbH and EPFL-LMIS1 whose main objective is the development of a new set of polymer materials for MEMS/NEMS technologies with an associated process library.
The materials that the partnership has planned to develop are Ormocer and SU-8.
The objective is to modify both materials in a way that they can be processed using Electron Beam Lithography, Direct Laser Writing, UV-Nano Imprint Lithography and Ink-Jet printing.
The developed material…
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
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MICRO RESIST TECHNOLOGY GESELLSCHAFT FUER CHEMISCHE MATERIALIEN SPEZIELLER PHOTORESISTSYSTEME MBH
Germany, Berlin
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
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