CORDIS Project
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AMMicro aims to enhance the reliability of microelectromechanical systems (MEMS) by developing advanced 3D MEMS devices with built-in damage sensing and impact protection. Utilizing localized electrodeposition and innovative mechanical testing, the project seeks to create robust microlattices for various applications,…
Current 2.5D microelectromechanical systems (MEMS) devices are disadvantaged by their distinctive unreliability.
Lack of built-in damage sensing, impact protection mechanisms and the absence of application-relevant reliability tests, collectively mask the true potential of MEMS devices. AMMicro will address these limitations by designing and developing the building blocks essential for robust next-generation 3D MEMS devices.
This will be done using a novel combination of cutting edge electrodepo…
MAX-PLANCK-INSTITUT FUR NACHHALTIGEMATERIALIEN GMBH
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