CORDIS Project
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This project focuses on improving the directed self-assembly of block copolymers for integrated circuit manufacturing. It aims to develop new materials and computational models to enhance pattern formation and defect reduction in the production process.
Directed self-assembly (DSA) of block copolymers is one of the most promising techniques to enable the continued miniaturization of ICs and to boost the performance in More Moore.
It combines top-down photolithography for creation of guiding patterns with engineered new materials and processes to facilitate cost effective bottom-up techniques for pattern density multiplication and defect rectification.
An industry scale application of DSA still faces two challenges: i) The host substrate heavily…
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
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