CORDIS Project
Funding breakdown and partner intelligence are Premium
Sign in and upgrade to Premium for EU contribution totals, consortium analytics, OpenAlex research context, and AI summaries. · 0 consortium intelligence fields visible of 1
Start free • Cancel anytime • 14-day refund guarantee
This project investigates cryogenic plasma etching processes to improve the fabrication of microchips. By studying the interaction of plasma with surfaces, it aims to address challenges in achieving smaller electronic features while minimizing damage.
Microchips have caused a revolution in electronics over the last few decades.
Following Moore's law, much effort has been put into continuously shrinking electronic feature dimensions.
Indeed, typical feature sizes of semi-conductor decreased from 10 µm in 1971 to 14 nm in 2014.
With the shrinkage of feature sizes, plasma etching plays a more and more important role due to its anisotropy during surface processing.However, to go beyond 14 nm features, current state-of-the-art plasma processing fa…
UNIVERSITEIT ANTWERPEN
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Similar projects, consortium collaboration history, frequent partners, and OpenAlex research context.
Guests see up to 5 EuroSciVoc fields.
Guests see up to 5 topics.
