CORDIS Project
Funding breakdown and partner intelligence are Premium
Sign in and upgrade to Premium for EU contribution totals, consortium analytics, OpenAlex research context, and AI summaries. · 0 consortium intelligence fields visible of 1
Start free • Cancel anytime • 14-day refund guarantee
This project focuses on developing micro and nano-electromechanical systems using nanocrystalline diamond. The aim is to optimize the growth and processing of this material for various applications, including MEMS and beyond.
This project aims to develop high frequency, high quality factor micro and nano – electromechanical systems (MEMS) from nanocrystalline diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young’s modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials.
High performance NCD growth and planarization will be optimised for MEMS applications.
The realisation of continuous, smooth (<1nm rms over 1…
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Similar projects, consortium collaboration history, frequent partners, and OpenAlex research context.
Guests see up to 5 EuroSciVoc fields.
Guests see up to 5 topics.
