CORDIS Project
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HaloFreeEtch focuses on developing sustainable, halogen-free etching processes for semiconductor manufacturing. By exploring innovative methods and materials, the project aims to enhance the efficiency and precision of plasma etching while reducing environmental impact.
Current industrial plasma etching processes are not sustainable because they make use of halogens.
HaloFreeEtch will take a fundamental, interdisciplinary and systematic approach to find new halogen-free etching processes.HaloFreeEtch aims to identify new, halogen-free and sustainable etching processes for sustainable semiconductor manufacturing, applied to deep etching of silicon and silicon oxide.
The novel etching processes we aim for shall be clean (in terms of harmful chemicals), efficient…
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Czechia, Brno
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
Belgium, Bruxelles / Brussel
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
Austria, Graz
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
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