CORDIS Project
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HoLiSTEP focuses on advancing holographic lithography technology to enable the production of high-resolution 3D components. By developing a cost-effective prototype, it aims to enhance the manufacturing process for integrated circuits and micro-optical devices while reducing energy consumption and material waste.
To achieve ever shrinking dimensions and higher resolutions of circuit elements, projection lithography (PL), is growing in complexity and cost to manufacturers.
It is limited to producing 2D images on flat surfaces.
Extension to 3D imaging is restricted by trade-off between focus depth and resolution.
Advanced, cost-efficient solutions to fabricate wafer-scale 3D components are required.HoLiSTEP unleashes the potential of sub-wavelength Holographic Lithography (HL) as a powerful and enabling di…
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Finland, Tampere
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
Netherlands, Delft
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
Finland, TAMPERE
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
Lithuania, Vilnius
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
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