CORDIS Project
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This project focuses on assessing and enhancing metrology tools for the semiconductor industry, specifically for 3D devices. It aims to evaluate the readiness and reliability of new measurement technologies to improve processing challenges in semiconductor manufacturing.
Within the food chain of equipment delivery for the semiconductor industry, Europe has kept a very strong position in the metrology area with many companies establishing themselves as main leaders in the field.
Hence in line with the objectives of the ICT25 call for innovation action to overcome the (initial) barriers for the successful commercialization of novel European products, this project aims at exploring for a number of metrology solutions their technological readiness, reliability and…
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
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TECHNICAL UNIVERSITY OF DENMARK DTU
Denmark, Kongens Lyngby
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
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