CORDIS Project
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The project focuses on advancing microelectromechanical systems (MEMS) research at the Middle East Technical University by enhancing its fabrication capabilities and fostering collaboration with European centers. It aims to develop a range of sensors and devices while training researchers and upgrading infrastructure.
MEMS activities at METU have been continuing since 1995 in the framework of a number of national/international projects, including NATO-SfS (TU-MICROSYSTEMS), US NSF, COST, FP6 (AMICOM), and several national projects.
During these projects, a wide variety of sensors and devices have been developed, such as pressure sensors, CMOS infrared detectors, accelerometers, gyroscopes, humidity sensors, temperature sensors, frost sensors, biosensors, energy harvesters, and various RF MEMS componentsIn 199…
MIDDLE EAST TECHNICAL UNIVERSITY
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