CORDIS Project
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The project aims to develop a micro jet actuator based on silicon technology, optimizing its design for high output velocities. It involves precise micro-machining techniques to create components that enhance performance and efficiency in jet actuation.
The objective of the project is to develop and manufacture µSJA based on silicon technologies.
To reach the required output velocities of the µSJA, the chamber and the exit channel or nozzle will be optimized using different analytic and numeric methods.
Based on the results of the optimization, a design will be investigated and transferred to silicon based structures.
The production of the µSJA will be performed in the clean rooms of the ZfM and will be realized on wafer-level.
The two differen…
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