CORDIS Project
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This project explores innovative manufacturing methods for micro- and nanoelectromechanical systems (MEMS and NEMS). It focuses on flexible and cost-effective integration techniques to enable a wider variety of applications beyond traditional semiconductor manufacturing.
Micro- and nanoelectromechanical system (MEMS and NEMS) components are vital for many industrial and consumer products such as airbag systems in cars and motion controls in mobile phones, and many of these MEMS and NEMS enabled applications have a large impact on European industry and society.
However, the potential of MEMS and NEMS is being critically hampered by their dependence on integrated circuit (IC) manufacturing technologies.
Most micro- and nano-manufacturing methods have been develope…
KUNGLIGA TEKNISKA HOEGSKOLAN
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