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Sirius X-ray Solutions develops advanced X-ray metrology instruments for characterizing thin film materials in the semiconductor industry. Their compact XRS SEMI instrument provides rapid and precise measurements of crystalline structures, enhancing the efficiency of material development.
Due to increased demand for semiconductor devices, low-power electronics, electric vehicles, sensors, IoT (Internet of things), new complex thin film materials are constantly engineered by sophisticated MBE (molecular beam epitaxy), PVD (physical vapour deposition) or ALD (atomic layer deposition). X-rays are well suited to assess the crystalline structure of new thin film materials due to the intrinsic properties of X-rays to probe material on the sub-nanometer scale.
These crystal properties (…
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