CORDIS Project
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This project focuses on developing pulsed-plasma technology for integrating atomically thin transition metal dichalcogenides in nano-electronic devices. It aims to enhance control over plasma processes for doping and etching, addressing challenges in the application of 2D materials in electronics.
Atomically thin layers of transition metal dichalcogenides (TMD) are gaining increasing attention as new materials for futureBeyond-CMOS electronics.
Recently, a great progress has been made in deposition of high quality layers of TMDs pavingthe way towards wafer scale device manufacturing.
However, many fundamental and technological challenges still have tobe addressed.
Precise tuning of the number of layers, doping, surface functionalization and selective low damage etching ofTMDs are among th…
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
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