CORDIS Project
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RESIN GREEN is developing environmentally friendly semiconductor manufacturing processes by creating new resist materials that minimize the use of harmful solvents. The project aims to enhance lithography techniques while reducing the environmental impact of semiconductor production.
Alternative (to mainstream Silicon CMOS technologies) semiconductor manufacturing process technologies able to sustain in the mid- and long-terms the fast pace evolution of device performance, miniaturisation and cost, while reducing environmental footprint. RESIN GREEN proposes the development of new resist material platforms that can be processed under conditions offering clear advantages regarding reduction of environmental footprint.
In particular, new resist chemistries targeting to mate…
NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS""""
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Greece, ATHENS
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
UNIVERSITE LYON 1 CLAUDE BERNARD
France, Villeurbanne Cedex
Type: University / higher education
Activity type: Higher or Secondary Education Establishments
SME: No
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