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The SELDOM project focuses on developing selective deposition techniques for transition metal dichalcogenides, which are important for nano-electronic applications. By studying the mechanisms of thin film deposition, the project aims to enhance the fabrication of advanced electronic components.
SELDOM aims to generate the scientific understanding needed to design area-selective deposition approaches for transition metal dichalcogenides (MX2), a class of inorganic 2D materials that recently attracts great interest for nano-electronic applications.
We will investigate the substrate dependence and nucleation mechanisms of MX2 Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD).
This substrate dependence will be exploited to attain selectivity.
Finally, the findings can direc…
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
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