CORDIS Project
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This project seeks to advance 3D micromachining of silicon for applications in photonics and microfluidics. By developing new laser technologies and understanding the interaction between lasers and silicon, the research aims to unlock novel applications in these fields.
The aim of the present proposal is to initiate an interdisciplinary research program to develop 3D micromachining of silicon towards novel silicon photonics and microfluidic applications.
We are motivated by the myriad of applications based on 3D micromachining of glass that peaked in the early 2000's, and still continues to impact integrated photonics and microfluidics, among other fields.
These successes were achieved using lasers at wavelengths for which glass is transparent (most commonly 1…
BILKENT UNIVERSITESI VAKIF
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