CORDIS Project
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This project aims to advance nanodevice fabrication through new lithographic techniques to achieve single nanometer manufacturing for next-generation devices. It explores scanning probe lithography and focused electron beam processing to create innovative materials and devices.
To extend beyond existing limits in nanodevice fabrication, new and unconventional lithographic technologies are necessary to reach Single Nanometer Manufacturing (SNM) for novel 'Beyond CMOS devices'.
Two approaches are considered: scanning probe lithography (SPL) and focused electron beam induced processing (FEBIP).
Our project tackles this challenge by employing SPL and FEBIP with novel small molecule resist materials.
The goal is to work from slow direct-write methods to high speed step-and-…
TECHNISCHE UNIVERSITAET ILMENAU
Partner organizations (coordinator is shown above), with normalized type and CORDIS activity type. Guests see up to 4 partners.
Austria, St Florian Am Inn
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
Bulgaria, Varna
Type: SME
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: Yes
Switzerland, Rueschlikon
Type: Company (for-profit)
Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)
SME: No
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