CORDIS Project
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This project aims to enhance failure analysis techniques for semiconductor devices using improved electron spin resonance imaging. By developing a prototype that offers high sensitivity and resolution, the project seeks to provide non-destructive analysis of semiconductor materials and structures.
The semiconductor industry is a multibillion-dollar endeavor situated at the heart of the modern world.
During the development and production of semiconductor devices things can go wrong, and the source of the problems must be analyzed.
This is the impetus for another large industry aimed at providing methods for failure analysis (FA) of semiconductor devices. FA systems make use of a variety of sophisticated techniques that provide a wealth of information at very high spatial resolutions.
How…
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